ENI GHW12Z-12098 Power Supply System

ENI GHW12Z-12098 Power Supply System 

 Introduction

The ENI GHW12Z-12098 power system is a classic Genesis series RF plasma power supply commonly used in semiconductor production lines

1. Stable power output and good process consistency during long-term continuous operation

2. Comes with reflection power protection, providing quick protection in case of abnormal load

3. Adopting LDMOS circuit, the whole machine has high conversion efficiency

4. Support remote communication, convenient for machine master control to regulate power

5. Rack mounted air-cooled design, easy maintenance and repair

1. Model GHW12Z-12098

2. Rated output power 1200W

3. RF frequency 13.56MHz

4. Standard 50 Ω output impedance

5. Compatible with analog and digital signal control

Applicable scenarios

1. Power supply for semiconductor plasma etching equipment

2. PECVD thin film deposition process

3. Plasma surface cleaning of wafers

4. Plasma process for flat panel display

5. Replacement and maintenance of spare parts for semiconductor equipment

Overall, ENI GHW12Z-12098 is a mature 1.2kW RF power supply and a commonly used spare part for repairing old vacuum plasma equipment

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