TURBOVAC 830051V1001 Turbomolecular Pump

TURBOVAC 830051V1001 Turbomolecular Pump 

 Introduction

TURBOVAC 830051V1001 is a Leybold TURBOVAC 350i semi magnetic levitation turbo molecular pump widely used in semiconductor vacuum chambers

1. The semi maglev hybrid bearing structure has low operating vibration and better long-term stability

2. Built in integrated drive frequency converter, no additional external controller required, saving cabinet space

3. Oil free vacuum design, no oil or gas backflow, protecting the chamber and wafer from contamination

4. Equipped with a protective gas interface, it can be filled with nitrogen to resist some corrosive process gases

5. Rich communication interfaces, supporting RS485, USB, and digital I/O, making it convenient for the machine to read the pump status

1. Model 830051V1001, Leybold TURBOVAC 350i Turbomolecular Pump

2. Inlet flange DN100 ISO-K

3. Nitrogen pumping speed 350L/s

4. Air cooling method, suitable for dust-free workshop environment

5. Real time feedback of speed, temperature, and fault alarm signals

This molecular pump is commonly used in various process equipment that requires clean and high vacuum

1. Vacuum chamber of semiconductor etching equipment

2. Vacuum thin film deposition PVD/CVD equipment

3. Construction of high vacuum system for mass spectrometry analyzer

4. Vacuum maintenance of optical coating equipment

5. Replacement and maintenance of spare parts for old vacuum equipment

Overall, TURBOVAC 830051V1001, a Leybold molecular pump, has high reliability and is a commonly used spare part for repairing and replacing semiconductor vacuum equipment

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