Paramount 3156330-116 RF Generator

Paramount 3156330-116 RF Generator 

 Introduction

The Nikon 4S013-284 optical platform component is an internal optical reference module for Nikon lithography machines, which carries the lens assembly and optical detection components.

Product Features:

1. High rigidity cast iron base, suppressing small vibrations and ensuring stable exposure light path

2. Multi point precision leveling mechanism, capable of fine-tuning optical tilt angle and correcting optical path deviation

3. The surface has undergone aging treatment, resulting in extremely low deformation in temperature changing environments

4. Integrated positioning pin structure, quick reset during replacement, reducing optical path calibration time

5. Anti dust sealing design, protecting internal optical components from the influence of clean environmental particles

Product Parameters:

6. Model: 4S013-284

7. Material: Low stress precision casting

8. Function: Optical path bearing and reference positioning

9. Adjustment method: Multi point micro adjustment

10. Compatible equipment: Nikon NSR series lithography machine

Application fields:

11. DUV lithography machine projection optical system support

12. Exposure light path alignment component carrier

13. Photolithography equipment defocus detection optical unit base

14. Fixing of optical monitoring module for mask stage

15. Replacement of Nikon lithography machine optical platform spare parts

Maintenance and replacement of lithography machine optical system, Nikon 4S013-284 optical platform components can maintain the original optical path reference accuracy

Product imag

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