Home > Product > DCS control system > Varian 9698922S001 turbo vacuum pump

Varian 9698922S001 turbo vacuum pump

Introduction

Varian 9698922S001 turbo vacuum pump belongs to the TV551 Navigator series molecular pump, with stable clean vacuum performance.

Product Features:

1. Turbine+traction composite structure, with strong pressure resistance in the front stage

2. Permanently lubricated ceramic bearings, with minimal daily maintenance workload

3. The whole machine has low vibration and minimal interference with precision equipment

4. Built in driver monitoring, allowing real-time viewing of pump operation status

5. Oil free pumping, will not contaminate the vacuum chamber

Product Parameters:

1. Model: 9698922S001

2. Pump type: Turbine Traction Composite Molecular Pump

3. Rotor material: high-strength aluminum alloy

4. Working environment temperature: 5 ℃~35 ℃

5. Support installation in any direction

Application fields:

1. High vacuum chamber for semiconductor equipment

2. Vacuum system for mass spectrometry analysis instruments

3. Surface analysis research equipment

4. Vacuum unit for thin film deposition process

5. Replacement of spare parts for old vacuum equipment

The Varian 9698922S001 turbo vacuum pump is a reliable replacement pump for upgrading and maintaining precision vacuum systems.

Product imag

9698922S001.webp (3).jpg

ontroller Module

Other website links