Kyoto Denkiki KDS-30350WF Output DC Power Supply Module

Kyoto Denkiki KDS-30350WF Output DC Power Supply Module 

 Introduction

Kyoto Denkiki KDS-30350WF is a dual DC output power module for Kyoto Electric Machinery, designed specifically for the Hitachi M-712E shallow trench etching machine to provide stable high-voltage DC power supply to the etching chamber.

1. Dual independent voltage regulation output, with small voltage drift during load fluctuations, ensuring consistency in etching process;

2. Built in complete protection circuit, which can quickly cut off output for overvoltage, overcurrent, overheating, and short circuit;

3. Active power factor correction design to reduce harmonic interference and adapt to the electromagnetic environment of semiconductor cabinets;

4. Equipped with status feedback signals, it can upload operation and alarm information to the machine master control;

5. Rack mounted integrated unit, easy to disassemble and assemble, convenient for on-site maintenance and replacement of etching equipment.

1. Input specifications: three-phase AC200-220V, 50/60Hz;

2. Rated output: 350V, 30A;

3. Output type: Dual DC output;

4. Compatible machine: Hitachi M-712E shallow groove etching machine;

5. Heat dissipation method: Built in air-cooled heat dissipation.

1. Hitachi M-712E etching machine chamber high-voltage DC power supply;

2. Power supply for semiconductor shallow trench isolation STI etching process;

3. Etching chamber bias auxiliary power supply;

4. Etching equipment cavity electrode driving power supply;

5. High voltage DC unit for semiconductor dry etching equipment.

This KDS-30350WF is the core power supply spare for Hitachi etching machines, and its voltage stability directly affects the wafer etching profile and yield.

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