KYOSAN EAK2T 3M39-000028-12 matching controller

KYOSAN EAK2T 3M39-000028-12 matching controller

 Introduction

KYOSAN EAK2T 3M39-000028-12 matching controller

KYOSAN EAK2T 3M39-000028-12 matching controller is compatible with TEL semiconductor RF matching system, with automatic impedance matching and stable operation.

1. Automatic adjustment of RF impedance, fast matching response speed

2. Closed loop feedback control, continuous and stable power output

3. Built in multiple circuit isolation to resist plasma interference

4. Compatible with original RF power supply, high overall compatibility

5. Real time collection of standing wave data, rapid warning of anomalies

6. Multiple protections against overcurrent, overvoltage, and overheating

7. Industrial metal body, dust-proof, corrosion-resistant and oil resistant in the workshop

8. Wide temperature operating range, with unchanged performance under high and low temperature conditions

9. Standard cabinet installation size, easy to disassemble and replace

10. Equipped with a status indicator light, the fault is intuitive and easy to troubleshoot

11. Optimization of filtering circuit to reduce RF signal loss

12. Parameters can be debugged online, with short downtime for maintenance

13. Anti vibration structure, suitable for long-term continuous operation of production lines

14. Full electrical testing at the factory, high consistency and low failure rate

15. Low loss circuit design, low heat generation during long-term operation

In summary, KYOSAN EAK2T 3M39-000028-12 matching controller has high matching accuracy and complete protection, and is the core supporting component of the RF circuit of semiconductor etching equipment.

Product imag

ontroller Module

CI860K01 3BSE032444R1 power module
 SB822 3BSE018172R1 rechargeable battery unit
Metrix 5533-104 Sensor

Other website links

CS513 3BSE000435R1局域网模块
3BSE014666R1 CI541V1通讯卡模块
CI535V30 3BSE022162R1总线控制模块