LION CPL290 Capacitive Sensor 0190-C7681

LION CPL290 Capacitive Sensor 0190-C7681

 Introduction

LION CPL290 0190-C7681 is a non-contact precision capacitive displacement sensor with nanometer level detection accuracy, suitable for gap and deformation detection in semiconductor and precision servo equipment.

1. Unique dual range switching, single probe compatible with two measurement sensitivities

2. Ultra high detection resolution, up to 0.05 nanometer level accuracy at low frequencies

3. Four bandwidth options are available, with a maximum of 15kHz for high-speed dynamic data acquisition

4. Linear error less than 0.2% FS, stable measurement values without offset

5. Low temperature drift coefficient, minimal measurement drift in high and low temperature environments

6. Extremely small phase offset, suitable for servo closed-loop real-time measurement and control scenarios

7. Coarse adjustment+fine adjustment dual zero position knob, simple and intuitive calibration operation

8. Front end BNC analog output, rear end differential 68 pin acquisition interface

9. Five segment range indicator light, visually determining the effective measurement range of the probe

10. Non contact capacitance detection, no wear and longer service life

11. Support vacuum adaptation probes, which can be used for vacuum process chambers

12. The probes are interchangeable and can be replaced with the same model without the need for complex recalibration

13. Built in circuit shielding to resist electromagnetic signal interference from production lines

14. Modular plug-in design of rack, convenient disassembly and maintenance

15. Original factory aging calibration of the entire machine, capable of continuous measurement for 7 × 24 hours

Conclusion: LION CPL290 0190-C7681 has high precision and fast dynamic response, and is a core sensing accessory for displacement, clearance, and vibration detection of precision equipment.

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