TEL 5880-000064-V1 DC power supply assembly
Introduction
TEL 5880-000064-V1 DC power supply assembly
Suitable for TEL etching and thin-film semiconductor equipment cavity power supply
Multi channel DC stabilized output with low ripple, ensuring stable sensing signals
Built in soft start, precise board for suppressing power surge protection
Multiple power-off protection against overvoltage, overcurrent, short circuit, and overheating
All metal shielding to resist radio frequency plasma electromagnetic interference
Low exhaust clean components, suitable for dust-free wafer workshops
Real time voltage and temperature feedback, fault signal uploaded to the main control
Independent branch design, single path failure does not result in complete machine shutdown
Optimized heat dissipation structure, controllable temperature rise for long periods of full load
Gold finger direct insertion module, easy to disassemble and replace
Wide temperature substrate, stable high and low temperature performance around the cavity
Strengthen PCB solder joints to prevent virtual soldering under vibration conditions
Clear screen printing points for quick troubleshooting and fault location
Original factory power on aging detection, directly compatible with the same model
Integrated compact structure, suitable for narrow installation positions of equipment
TEL 5880-000064-V1 DC power supply assembly provides pure and reliable power supply, and is a specialized power supply spare part for semiconductor process chambers
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