Daihen RMN-20E2-V RF Matcher

Daihen RMN-20E2-V RF Matcher        

 Introduction

Daihen RMN-20E2-V RF Matcher Product Features

Introduction: Daihen RMN-20E2-V is a specialized automatic RF matching device for semiconductor etching and coating equipment, suitable for 13.56MHz, 2000W RF systems, and stably matches the load impedance of the cavity.

Made by Daihatsu in Japan, compatible with TEL semiconductor process equipment

13.56MHz standard RF frequency band, rated output power 2000W

Fast automatic impedance tuning to reduce RF power reflection loss

Metal fully enclosed shielding shell, isolating electromagnetic interference in the workshop

Wide range AC input 100-200VAC, compatible with the factory power grid

Built in multiple circuit protections for overcurrent, overvoltage, and overheating

Equipped with safety interlock cover plate, high-pressure operation is safer

Equipped with RS232 communication interface, it can be connected to the main control of the whole machine

Low RF loss internal components, high power transmission efficiency

Real time collection of standing wave signals, rapid feedback of abnormal states

Standard cabinet vertical installation, easy disassembly and replacement operation

Built in heat dissipation duct, capable of continuous operation for 24 hours without high temperatures

Clean workshop dust-proof sealing structure, suitable for dust-free working conditions

Original precision RF capacitors and inductors with stable matching accuracy

Reduce plasma fluctuations and ensure uniformity of thin film processes

Conclusion: Daihen RMN-20E2-V has fast tuning and complete protection, making it a core matching accessory for semiconductor RF process equipment.

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