AMAT 0090-A1161 RF Controller

AMAT 0090-A1161 RF Controller        

 Introduction

AMAT 0090-A1161 RF Controller Product Features

Introduction: AMAT 0090-A1161 is a dedicated RF control module for semiconductor equipment, which stably outputs RF energy and is compatible with wafer etching and coating processes.

Accurate power output with minimal power fluctuations

Paired with matching network to reduce RF reflection loss

Real time monitoring of chamber load, automatic adjustment of output

Built in multiple protections for overcurrent, overheating, and short circuit

Metal shielding shell to resist electromagnetic interference from equipment

Standard equipment bus, connected to the main control system of the whole machine

Compact board structure, easy disassembly and assembly of cabinet

Local storage of process parameters and retention of power-off data

Low harmonic output, does not interfere with surrounding precision components

Clean grade components, suitable for dust-free workshop conditions

Wide temperature stable operation, supporting 24-hour continuous work

Built in fault self check, quickly report abnormal codes

Original factory matching agreement, no additional debugging and adaptation required

50 Ω standard impedance, high RF transmission matching

Modular structure, saving time and effort in maintenance and replacement

Conclusion: AMAT 0090-A1161 is a core control component for plasma processes, commonly used in AMAT series semiconductor deposition and etching equipment.

Product imag

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