TEL 3D80-001488-V2 power module

TEL 3D80-001488-V2 power module        

 Introduction

TEL 3D80-001488-V2 power module

beginning

TEL 3D80-001488-V2 is an original multi-channel power supply module for Telius T-3044SS etching machine, specially designed for 300mm wafer dry etching equipment. It has multi-channel stable output and complete protection, ensuring uninterrupted process power supply for the machine 24/7.

Original factory compatible TEL 300mm dry etching machine, interface and power supply parameters fully match without the need for modification

Integrated multiple independent DC outputs, 5V/12V/24V multi level voltage, synchronously supplied to the main control, sensing, and driving boards

Built in multi-stage EMI filtering circuit, filtering out power grid clutter and avoiding interference with precision signal acquisition

Wide AC input adaptation, stable output voltage without drift under grid voltage fluctuation conditions

Each channel has independent voltage and current regulation, and a single fault does not affect the normal power supply of other circuits

Integrated surge suppression circuit, no voltage surge damage to board components during power on and off moments

Multiple hardware protections for all channels, instant cut-off and feedback of alarms for overcurrent, overvoltage, undervoltage, and overtemperature

Split type aviation plug output interface, distinguishing between cavity, transmission, and detection branches, with clear wiring and easy maintenance

Integrated metal sealed heat dissipation chamber, balanced heat dissipation during full load operation, and less prone to high temperature shutdown during long-term operation

Real time power supply status monitoring chip, capable of uploading voltage and current operation data of each channel to the main control

Thickened industrial PCB with three anti coating, moisture-proof and dustproof, suitable for semiconductor clean workshop environment

Reinforce the welding process of electronic components, resist equipment cavity vibration, and prevent solder joints from detachment and failure

Modular overall structure, standard card slot insertion and replacement in the rack, significantly reducing equipment downtime for maintenance

Low loss conversion circuit, high power conversion efficiency of the whole machine, low heat generation during long-term operation

Lead free original manufacturing process, compliant with RoHS standards, meets the overall compliance requirements of wafer production lines

ending

The TEL 3D80-001488-V2 power module has stable multi-channel power supply and reliable channel isolation protection, and is the core power supply unit of the complete control system for TEL 300mm dry etching equipment.

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