AMAT 0190-16825 thyristor power controller

AMAT 0190-16825 thyristor power controller        

 Introduction

AMAT 0190-16825 Controllable Silicon Power Controller Product Features

beginning

AMAT 0190-16825 is a SCR thyristor power controller specifically designed for semiconductor coating equipment. It accurately controls the heating load power of the chamber, maintains stable temperature control, and has a long non-contact lifespan. It is suitable for continuous process operation of wafer production lines for 7 × 24 hours.

The original Centura series machines are perfectly matched with the cavity heating circuit, without the need for modification or adaptation

Dual mode of phase angle and zero crossing trigger, can be switched and adapted to various types of resistance heating modules as needed

0-10V standard analog signal control, high linearity of power regulation, minimal temperature control fluctuations

Maximum carrying capacity of 30A single-phase AC current, meeting the high-power heating load requirements of the cavity

Contactless thyristor switch, no arc wear, significantly improves the service life compared to contactors

Built in real-time current and voltage sampling, automatically compensating for power deviation caused by temperature drift and component aging

Multiple hardware protections, immediate locking and output of alarm signals for overcurrent, overvoltage, overtemperature, and phase loss

Integrated metal heat dissipation duct, balanced heat dissipation during full load operation, avoiding overheating and power reduction

Built in EMI filtering circuit, suppresses harmonic interference, does not affect machine communication and sensing signals

Supports three output modes: constant voltage, constant current, and constant power, suitable for various types of process heating formulas

Standard rack plug-in structure, regular terminal wiring, short disassembly and maintenance downtime

Equipped with a built-in status indicator light, it provides intuitive and visual troubleshooting for running, faults, and abnormal loads

Optoelectronic isolation of strong and weak electrical circuits, isolation of high-voltage shocks, and protection of the safety of the main control board

Reinforced dust-proof casing, suitable for semiconductor cleanrooms, moisture-proof and slightly corrosion-resistant

Compliant with UL and RoHS industry standards, meeting the factory compliance requirements for semiconductor complete machines

ending

The AMAT 0190-16825 thyristor power controller has precise temperature control, complete protection, and durable operation. It is the core power regulation component of the AMAT thin film deposition equipment chamber heating system.

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