TIMBRE CANPUS 2L87-127727-V1 Controller Module

TIMBRE CANPUS 2L87-127727-V1 Controller Module        

Product Details Introduction

TIMBRE CANPUS 2L87-127727-V1 Controller Module

TIMBRE CANPUS 2L87-127727-V1 is compatible with semiconductor plasma RF matching control

24VDC standard power supply, compatible with wafer equipment cabinet power supply system

Equipped with Ethernet port and SMA RF interface, integrated signal transmission and reception

Built in circuit filtering to isolate workshop RF and electromagnetic interference

Real time monitoring of RF power and standing wave ratio operation data

Comes with fuse overcurrent protection and short circuit automatic power-off protection

Built in fault self check, intuitive display and recognition of abnormal states

Integrated box with heat dissipation holes, stable temperature control during long-term operation

Ethernet communication, can be connected to the main control upper system of the whole machine

RF signal isolation design to avoid crosstalk of cavity signals

Standardized box size, easy disassembly and replacement of cabinets

Adapt to the working conditions of etching and thin film deposition plasma processes

Metal sealed shell, dust-proof and suitable for dust-free clean workshops

Factory aging calibration of the entire machine, simple machine debugging

Compatible with CANOPUS control units of the same series, with strong versatility for replacement

In summary, the TIMBRE CANPUS 2L87-127727-V1 controller module has stable RF control and complete protection, making it a dedicated supporting controller for semiconductor plasma equipment

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