TEL 3Z80-000653-V4 processor module

TEL 3Z80-000653-V4 processor module        

Product Details Introduction

TEL 3Z80-000653-V4 processor module

TEL 3Z80-000653-V4 is compatible with TEL etching and thin film deposition equipment main control operation

High speed acquisition of various sensing signals such as chamber pressure, temperature zone, and gas flow rate

Equipped with signal isolation filtering to resist electromagnetic interference in the workshop

Multi bus synchronous communication, coordinated operation of various sub boards in the whole machine

Independently execute the entire process logic and accurately control the timing of equipment flow

Real time full channel self check, quickly report alarm information for line abnormalities

Standard plug-in card structure, easy to disassemble and replace, time-saving

Equipped with multiple electrical protections, automatic protection against overvoltage, overcurrent, and overheating

Production using dust-free PCB technology, meeting the standards for clean room use

Onboard storage chip, stable storage of long-term process operation parameters

Line heat dissipation optimization, supporting 24-hour uninterrupted continuous operation

Compatible with the entire control system of 3Z80 series, with strong adaptability for expansion

Can be connected to the upper computer and MES on the production line, ensuring smooth communication of process data

Factory full function testing and calibration, easy on-site installation and debugging

Compact board shape, saving installation space inside the control cabinet

Overall, the TEL 3Z80-000653-V4 processor module has stable computing power and complete protection, making it the core computing board of Tokyo Electronic Semiconductor Process Equipment

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