TEL 5024-001812-11 Electronic Flow Meter
Product Details Introduction
TEL 5024-0001812-11 Electronic Flow Meter Product Introduction
TEL 5024-0001812-11 is suitable for precise measurement of semiconductor specialty gases, with stable measurement accuracy
The whole machine has no mechanical moving components, low long-term operation failure rate, and longer maintenance cycle
Adopting a thermal sensing scheme, the measurement is not affected by small fluctuations in gas temperature and pressure
Range coverage from small to standard flow range, wide range ratio, suitable for multi working condition switching
Millisecond level flow response speed, capable of capturing real-time data on instantaneous flow changes in pipelines
Built in digital signal processing module, resistant to workshop electromagnetic interference, stable data transmission
Standard 4-20mA analog signal and digital communication interface, can be directly connected to the production line PLC control system
The body is made of corrosion-resistant special alloy, suitable for process gases such as argon, nitrogen, silane, etc
The operating pressure loss is extremely low and will not change the original gas supply pressure parameters of the pipeline
Comes with built-in flow upper and lower limits, multiple fault self checking and alarm functions for air traffic control circuits
Small integrated compact structure, suitable for the narrow installation space of semiconductor equipment
Multiple point calibration is completed at the factory, eliminating the need for frequent on-site calibration
Wide temperature working range, adaptable to the constant temperature working environment of clean workshops
Support real-time reading and recording of both instantaneous and cumulative traffic data
Sealed protection level meets the standard, dustproof and moisture-proof, suitable for clean use environment in dust-free workshops
In summary, TEL 5024-0001812-11 electronic flowmeter, with its advantages of high precision, low loss, and easy integration, is a mainstream supporting component for gas metering in semiconductor processes.
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