Nikon S9037-0902N Image Sensor

Nikon S9037-0902N Image Sensor        

Product Details Introduction

Nikon S9037-0902N Image Sensor

Introduction

Hamamatsu produces a windowless back illuminated CCD image sensor specifically designed for Nikon ArF immersion lithography machines, used for detecting and locating light spots in the lithography optical path.

512 × 4 pixels, 24 μ m large-sized photosensitive unit

Back illuminated design, high UV sensitivity efficiency

Window free packaging, compatible with the internal vacuum light path of the machine

10MHz high-speed reading, matched with high-speed scanning of lithography machine

Spectral coverage of 200-1100nm, suitable for deep ultraviolet light sources

Support pixel merging mode to improve acquisition speed

Peak quantum efficiency exceeds 90%, strong recognition of weak optical signals

Low readout noise, minimal measurement spot error

Metal ceramic sealed packaging, dust-free and stable vacuum environment

24 pin direct insertion pin, compatible with Nikon optical signal board

Built in on-chip amplifier, signal transmission without attenuation

No cooling system, continuous operation at room temperature for a long time

Low dark current, long-term exposure without interference from impurities

Anti clean workshop micro UV irradiation aging

Compatible with Nikon immersion lithography machines such as NSR-S620D

ending

S9037-0902N is sensitive to light and has a fast collection speed. It is a core optical sensing component for optical path alignment and spot monitoring in lithography machines.

Product imag

ontroller Module

3BHE023784R2530 PPD113B01-25-111000 Controller Module
3BHE03205R0101 PCD235A101 exciter control module
SCHROFF MPS015 power module

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