MKS 651D-15414 Pressure Controller

MKS 651D-15414 Pressure Controller 

Product Details Introduction

Product Features of MKS 651D-15414 Pressure Controller

Introduction: MKS 651D-15414 is a digital pressure controller specifically designed for semiconductor vacuum processes. It is compatible with throttle valves and thin film gauges to accurately control the vacuum pressure in the cavity. Its core features are as follows:

Built in self-tuning PID algorithm, quickly locks the set pressure, with small overshoot

Control repeatability accuracy up to ± 0.1% FS, high consistency of process pressure

Dual row LCD digital display screen, supporting free switching of multiple pressure units

Built in 5 sets to store process settings, one click switch between different formulas

Equipped with two alarm relays, automatically outputting interlocking signals for abnormal pressure

Compatible with 0-5V/0-10V analog signals, suitable for various upper level industrial control systems

Equipped with RS232 and TTL multi-channel communication interfaces, remote reading and writing of parameters is convenient

Soft start pressure regulation function reduces airflow impact and stabilizes the chamber environment

Supports both local and remote zero calibration, with simple regulatory calibration operations

90-264V wide AC power supply, suitable for various power supply lines in the workshop

Metal shielded circuit design to resist RF electromagnetic interference from vacuum pumps

Standard rack mounted compact body, quick disassembly and assembly of cabinet rails

Equipped with 653 and 253 series vacuum throttle valves, it has strong adaptability

Multiple overvoltage and overcurrent hardware protection, stable long-term continuous operation

Product imag

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