AMAT 0190-27355 Low Temperature Pump

AMAT 0190-27355 Low Temperature Pump 

Product Details Introduction

The AMAT 0190-27355 cryogenic pump is a specialized refrigeration vacuum acquisition equipment for semiconductor high vacuum processes, suitable for harsh processes such as etching and deposition, with high cleanliness, high pumping speed, and strong stability. The following are its core characteristics.

Original AMAT 0190-27355 model, compatible with mainstream semiconductor process equipment.

Adopting closed-loop G-M refrigeration, no liquid nitrogen is required, and the operating cost is low.

Secondary cold head design, with a low temperature of up to 10K and high ultimate vacuum degree.

Oil free vacuum environment, avoiding oil pollution, suitable for clean processes.

High pumping speed design, with high efficiency in removing water vapor and light molecular gases.

Built in activated carbon adsorption layer effectively captures difficult to condense gases.

All metal sealed structure, leak resistant, and good vacuum retention.

Special low-temperature resistant material, which does not deform or become brittle under long-term low-temperature conditions.

Integrated anti vibration structure, adapted to the vibration environment of semiconductor equipment.

Supports rapid regeneration, and can quickly restore the pumping ability after heating and analysis.

Equipped with fault diagnosis, it can monitor the cold head temperature, vacuum degree, and operating status.

Standard interface design, seamlessly integrated with AMAT equipment control system.

Low power operation, with better energy efficiency than traditional diffusion pumps.

Compliant with semiconductor SEMI standards, with original factory quality and strong compatibility.

Compact structure, easy installation and maintenance, suitable for cleanroom layout.

In summary, the AMAT 0190-27355 cryogenic pump meets the core requirements of semiconductor ultra-high vacuum processes with high cleanliness, high pumping speed, high stability, and easy maintenance.

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