AMAT 0090-A7121 RF Controller

AMAT 0090-A7121 RF Controller 

Product Details Introduction

AMAT 0090-A7121 RF Controller (compatible with Endura/Ventura cavities)

Control the output power of RF power supply and collect real-time incident/reflected power

Automatic drive matching device tuning to reduce RF reflection loss

Bus docking device master control, remote issuance of process power parameters

Multiple protections against standing waves, overcurrent, and overheating, and abnormal cutoff of RF

Card insertion CPCI specification, in-situ plugging and replacement of cabinets

Multiple sets of process formulas are stored on the board, and power-off parameters are not lost

Equipped with a fault indicator light, quickly locate RF circuit faults

PCB triple protection coating, resistant to cavity RF interference and process corrosion

Analog interface, 0~10V external linkage power regulation

Hardware watchdog, automatic reset upon system crash to ensure the chamber does not shut down

Narrow amplitude regulated power supply, able to withstand voltage fluctuations in the computer room

Air cooled heat dissipation, continuous operation of 7 × 24-hour dust-free production line

Original factory standard wiring, no need to change wiring for direct installation

Used for PVD sputtering, dry etching plasma RF control

Common maintenance and replacement parts for AMAT coating machine

0090-A7121 is a core board for RF matching and power control.

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