DAIHEN NGA-50A-V RF Generator

DAIHEN NGA-50A-V RF Generator 

Product Details Introduction

The DAIHEN NGA-50A-V RF generator is compatible with TEL semiconductor etching and thin film deposition equipment, and is used for power supply in wafer plasma processes.

Rated 5kW RF power, 60MHz standard output frequency, stable process output

High precision power closed-loop control, small output fluctuations, ensuring consistency of coating process

Equipped with automatic impedance matching, it can quickly adapt to changes in cavity load and reduce arcing faults

Multiple circuit protection, automatic shutdown protection for overvoltage, overcurrent, overheating, and standing wave exceeding standards

The digital panel displays real-time power, standing wave, and fault codes, providing intuitive troubleshooting

Standard RS232 and Ethernet communication, can be connected to upper computer and semiconductor machine MES system

Air cooled cooling structure, dust-proof sealed chassis, suitable for dust-free clean workshop working conditions

Support continuous/pulse dual-mode output, flexibly matching different etching and sputtering processes

Three phase 200V industrial power supply, compatible with semiconductor factory standard power supply specifications

Modular power cavity, faulty components can be disassembled and replaced separately, easy maintenance

Low harmonic RF output, resistant to electromagnetic interference from workshop frequency converters, strong operational stability

Original factory standardized interface, can be used in conjunction with DAIHEN RF matching devices of the same series

Compact cabinet structure, easy to integrate into the control cabinet of vacuum process equipment

Designed for long-term full load operation, it can work continuously with mass production lines around the clock

Japanese original components with high durability, are the original matching power supply for TEL equipment

The DAIHEN NGA-50A-V process has high adaptability and low failure rate, making it the mainstream RF power supply component in semiconductor wafer manufacturing.

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