ASYST UTV-F2500HA Controller

ASYST UTV-F2500HA Controller   

Product Details Introduction

The ASYST UTV-F2500HA (CS-7100) is a high-precision semiconductor wafer transfer robot controller launched by the American company ASYST. It is designed specifically for cleanroom automation scenarios, ensuring the reliability and safety of wafer transfer in semiconductor processes through high-speed, stable, and precise motion control.

Core positioning: Belonging to the MECS CS-7000 series, it is a high-performance upgraded version of the UTV-2500H series (HA is a high specification version), specifically designed for motion and logic control of wafer handling manipulators.

Application scenarios: Suitable for semiconductor 8-inch/12 inch wafer fabs FAB、 Panel production line, equipped with ASYST series robotic arms, completes wafer picking, placing, transportation, and alignment in vacuum/atmospheric environments.

Control performance: Supports multi axis servo closed-loop control, with high trajectory planning accuracy and repeat positioning accuracy of ± 0.01mm, meeting the requirements of micron level clean working conditions.

Running speed: Fast motion response, supports high-speed point-to-point transmission, maximum running speed can reach 1.5m/s, and beat efficiency is better than similar controllers.

System architecture: Adopting a dual processor architecture of DSP and FPGA, it has strong computing power, high real-time performance, and can handle complex motion algorithms and IO logic.

Communication interface: standard DeviceNet, Ethernet, RS-232 communication ports, supporting seamless networking with PLC, sensors, and upper computer systems.

IO configuration: Integrated with 32 digital inputs and 16 digital outputs, with optoelectronic isolation design and strong anti-interference ability, suitable for various industrial sensors and actuators.

Programming function: Supports dedicated motion control language programming, built-in wafer transfer standard macro program, can quickly achieve trajectory editing, fault diagnosis, and parameter debugging.

Protection mechanism: Equipped with multiple protections such as overcurrent, overload, overtravel, collision detection, and emergency stop, ensuring equipment and wafer safety and reducing production failures.

Environmental adaptation: Industrial grade wide temperature operation (-10 ℃~50 ℃), compliant with SEMI S2/S8 safety standards, suitable for Class 10-1000 cleanroom environments.

Hardware design: Modular structure, compact chassis (approximately 400 × 300 × 150mm), rail mounted, efficient heat dissipation, suitable for dense deployment of cabinets.

Compatibility: Compatible with ASYST UTX/UTV series robotic arms, supporting docking control of standard wafer carriers such as SMIF, FOUP, FOSB, etc.

Fault diagnosis: Built in self diagnostic system, real-time monitoring of operating status, outputting alarm codes in case of abnormalities, supporting historical fault records for quick maintenance.

 Product imag

ontroller Module

NPBU-42C fiber optic distributor
SDCS-PIN-48-SD Pulse Transformer Board
Koyo F4-16AD-2 Analog Input Module

Other website links

3ASC25H209 DATX110 3BSC980004R784模拟输入I/O模块
EMERSON 1B30035H01输入输出模块
IC698CRE030 CPU处理器模块