Gasonics AWD-D-1-0-012 Microwave Power Supply
Product Details Introduction
Product Overview:
Gasonics AWD-D-1-0-012 is a microwave power module used in semiconductor equipment, mainly providing stable microwave energy and supporting processes such as plasma cleaning and debonding.
Technical parameters (typical):
Power output: Specific parameters depend on device configuration
Frequency range: meets the requirements of semiconductor plasma technology
Electrical interface: Standard industrial interface, compatible with Gasonics equipment
Working environment: cleanroom level, semiconductor manufacturing environment
Application scenarios:
Plasma excitation for wafer processing
Maintenance and replacement of semiconductor equipment
Microwave energy supply in automated process flow
Product advantages:
Stable output, supporting efficient processes
Good compatibility, easy to maintain equipment
High reliability, suitable for semiconductor environment
Product imag

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