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  • Gasonics AWD-D-1-0-012 Microwave Power Supply
Gasonics AWD-D-1-0-012 Microwave Power Supply

Gasonics AWD-D-1-0-012 Microwave Power Supply

Gasonics AWD-D-1-0-012 Microwave Power Supply

Product Details Introduction

Product Overview:

Gasonics AWD-D-1-0-012 is a microwave power module used in semiconductor equipment, mainly providing stable microwave energy and supporting processes such as plasma cleaning and debonding.


Technical parameters (typical):


Power output: Specific parameters depend on device configuration


Frequency range: meets the requirements of semiconductor plasma technology


Electrical interface: Standard industrial interface, compatible with Gasonics equipment


Working environment: cleanroom level, semiconductor manufacturing environment


Application scenarios:


Plasma excitation for wafer processing


Maintenance and replacement of semiconductor equipment


Microwave energy supply in automated process flow


Product advantages:


Stable output, supporting efficient processes


Good compatibility, easy to maintain equipment


High reliability, suitable for semiconductor environment

Product imag

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