Tokyo Electron 3M87-021335 Cooler Component

Tokyo Electron 3M87-021335 Cooler Component

Product Details Introduction

The Tokyo Electron 3M87-021335 Chiller Unit/Cooler Assembly is a temperature control component used in TEL semiconductor equipment. Its main function is to accurately cool and manage critical components such as chambers, power modules, process gas or liquid circulation systems during complex processes, ensuring the thermal stability and process consistency of equipment operation.

1、 Product Function Overview

Type: Cooler component/Liquid cooling system subunit

Main functions:

Provide cooling for key units such as cavities, RF modules, light sources, heating platforms, etc;

Maintain the system temperature within the set range to prevent overheating;

Support temperature feedback control and multi-stage coolant flow rate adjustment.

2、 Typical application areas

Etch Systems etching equipment

Cooling the wall of the reaction chamber and controlling the temperature of the plasma environment;

Inhibit particle generation and improve etching accuracy.

2. CVD/ALD deposition equipment

Stabilize the temperature of the reaction chamber and precursor transport system to avoid material crystallization or deposition defects;

Control the temperature gradient to ensure the uniformity of the film layer.

3. Development/cleaning module

Provide support for liquid cooling and circulation systems such as developing solution, de sizing solution, DI water, etc;

Ensure that chemical reactions occur at appropriate temperatures to improve cleaning effectiveness.

4. RF power supply and laser light source cooling

Prevent overheating of electronic devices such as RF adapters and laser components;

Extend the lifespan of critical electronic components.

Product imag

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