Tokyo Electron 2L39-000039-25 Automatic Matcher

Tokyo Electron 2L39-000039-25 Automatic Matcher

Product Details Introduction

The Tokyo Electron 2L39-000039-25 Automatic Matching Network is a key module used in semiconductor manufacturing equipment for radio frequency (RF) systems. Its main function is to automatically adjust the impedance matching between the RF power source and the load to optimize RF energy transfer efficiency, ensure process stability and equipment safety.

1、 Product functional positioning

Module type: Automatic impedance matching network

Main functions:

Real time detection of load impedance changes and automatic adjustment of matching circuit parameters;

Minimize reflected power and improve RF transmission efficiency to the greatest extent possible;

Protect the RF power source to prevent overload and malfunction;

Support multiple RF power levels to meet different process requirements.

2、 Main application areas

1. Plasma etching equipment

Maintain plasma stability and improve etching uniformity;

Automatically adapt to impedance fluctuations caused by process gas and chamber changes.

2. Chemical vapor deposition (CVD) and physical vapor deposition (PVD) equipment

Optimize RF energy input to improve film quality and consistency;

Support multi process parameter switching to enhance production flexibility.

3. Plasma enhanced processes (PECVD, RIE)

Realize fast automatic matching and reduce equipment debugging time;

Improve equipment operation efficiency and stability.

Product imag

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