TEL Tokyo Electron BX80-000062-V1 Controller Rack
Product Details Introduction
Tokyo Electron (TEL) BX80-000062-V1 Controller Rack - Detailed Explanation of Product Application Fields
1. Main control framework in semiconductor manufacturing equipment
Core function: The BX80-000062-V1 controller rack is a mechanical and electrical platform for installing and integrating multiple control modules, power units, communication interface boards, and other core components.
Main task: Unify and manage various control boards and modules required for equipment control systems, forming a system level control architecture.
Application equipment: Widely used in key semiconductor production equipment such as lithography machines, etching machines, coating and developing machines, CVD, etc.
2. Modular deployment platform for control system
Module installation: Supports multi slot structure, allowing flexible configuration of CPU board, I/O control board, communication board, etc.
Easy to maintain: Modular design facilitates quick replacement of faulty components, improving equipment maintainability and utilization rate.
Strong scalability: Control units can be added/removed according to process or control requirements to adapt to different product lines.
3. System communication and centralized power management
Communication integration: Communication buses are installed inside the rack to provide a unified high-speed data channel (such as VME, PCIe, or proprietary buses) between various modules of the controller.
Power distribution: Integrating a unified power interface and distribution structure to provide stable power for each module and reduce wiring complexity.
4. Industrial environmental adaptability and electromagnetic protection
Environmental adaptation: Suitable for clean rooms and high reliability environments, with excellent mechanical strength and electrical isolation performance.
Anti interference performance: It has good shielding measures against EMI (electromagnetic interference), ensuring the accuracy and stability of control system signals.
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