TEL Tokyo Electron 1B80-002815-11 Acquisition Card

TEL Tokyo Electron 1B80-002815-11 Acquisition Card

Product Details Introduction

TEL Tokyo Electron 1B80-002815-11 Data Acquisition Card (DAQ) is a high-precision signal acquisition module used in semiconductor manufacturing equipment. It is mainly responsible for collecting analog or digital signals from equipment sensors, monitoring units, and other parts, and transmitting them to the central control system for processing and control decision-making. It is widely used in the etching process of Tokyo Electron CVD、 In key process equipment such as cleaning and conveying.

The following is a detailed analysis of the module's functions and product application areas (excluding patterns):

1、 Basic Information

Product model: 1B80-002815-11

Product Name: Data Acquisition Card

Manufacturer: Tokyo Electron Ltd. (TEL)

Module type: Signal acquisition and conversion module (analog/digital input)

2、 Core functions

Sensor signal acquisition

Real time process parameters are collected from input terminals such as pressure sensors, temperature probes, flow meters, and current/voltage monitors on the equipment;

Supports multi-channel analog input (AI) and digital input (DI), with a certain resolution and sampling frequency.

Analog to Digital Conversion (ADC)

Perform A/D conversion on analog signals to enable them to be read and judged by central control systems (such as E244 controllers);

Supports high-precision 12 bit or 16 bit ADCs (according to TEL module design standards).

Status feedback and alarm linkage

Real time detection of changes in process status (such as temperature exceeding limits, vacuum leakage, abnormal current), and triggering of alarms or protection mechanisms;

Participate in the system's fault self diagnosis and closed-loop control logic.

Communicate with the main control module

Communicate with other components such as the main control board and I/O modules through TEL dedicated bus or industrial standard bus (such as RS-485, TTL);

Upload the collected data to the upper system for real-time monitoring or process adjustment.

Product imag

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