TEL Tokyo Electron 3281-000034-15 Semiconductor Module
Product Details Introduction
TEL Tokyo Electron 3281-000034-15 semiconductor module is a specialized functional module used in semiconductor manufacturing equipment, belonging to TEL Tokyo Electron's customized hardware, widely deployed in its etching CVD、 In process equipment such as cleaning and conveying. This module is classified under the 3281 series according to the TEL naming convention, typically representing functional modules in the fields of electrical control, signal processing, or communication interfaces.
The following is a detailed analysis of the module's functions and application areas (without patterns):
1、 Basic Information
Product model: 3281-000034-15
Product Name: Semiconductor Equipment Dedicated Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: Control/Communication/Logic Processing Unit (based on TEL device module system)
2、 Core functions (inferred based on numbering structure and TEL module characteristics)
Signal Relay and Interface Management
Realize electrical signal bridging between multiple subsystems within the device;
Provide functions such as signal buffering, conversion, and level adaptation to ensure reliable and stable system communication.
Communication and bus interface processing
Support TEL internal control bus, I/O interface bus, or external communication protocols (such as RS-232, TTL, CAN, etc.);
Used for command and status transmission between the main control board (such as E244 series) and slave devices.
Status monitoring and logic execution
Integrated control logic devices (such as FPGA, logic gate array) are used to process input signals and drive control logic;
It may have functions such as status lights, error detection, and equipment interlocking.
Modular connection
Can be inserted into TEL system control rack or backplane;
Paired with E249, BX81, 1B80 and other series modules, it forms a complete process control chain.
Product imag

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