TEL Tokyo Electron 2L81-050211-17 Sensor Module

TEL Tokyo Electron 2L81-050211-17 Sensor Module

Product Details Introduction

Product Name: 2L81-050211-17 Sensor Module

Manufacturer: Tokyo Electron Ltd

Product type: Sensor Module

1、 Product Overview

2L81-050211-17 is a sensor module used in Tokyo Electron (TEL) semiconductor manufacturing equipment, which is a key on-site detection and feedback component. It is usually used to collect operating parameters such as temperature, pressure, position, airflow, or vacuum degree, achieving precise monitoring and feedback control of the process.

2、 Main functions

Environmental or device status perception

Monitor physical quantities such as temperature, vacuum pressure, gas flow rate, liquid level, and action position inside the chamber.

Signal conversion output

Transmit the collected analog or digital signals to the upper control system or I/O board.

Linkage with control system

Support real-time feedback for process control, abnormal alarm, safety interlock and other functions.

3、 Applicable scenarios

This type of sensor module is widely used in the control units of the following TEL systems:

Etcher dry etching equipment

PVD/CVD Vacuum Thin Film Deposition System

Coater/Developer coating and developing equipment

Cleaning equipment, gas delivery, and vacuum systems

Product imag

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