TEL Tokyo Electron CX81-050023-12 Input/Output Module

TEL Tokyo Electron CX81-050023-12 Input/Output Module

Product Details Introduction

1、 Basic Information

Product model: CX81-050023-12

Product Name: Input/Output Module

Manufacturer: Tokyo Electron Ltd

Module type: Multi channel digital/analog I/O module

Equipment: Control systems commonly used in Tokyo Electron semiconductor manufacturing equipment, such as etching machines, cleaning machines, thin film deposition equipment (CVD, PVD), etc.

2、 Functional positioning

Equipment signal input/output interface

Receive input signals from device sensors, buttons, switches, etc

Output control commands to executing components such as valves, electromagnetic relays, fans, pumps, etc

The bridge between the main control system and the on-site equipment

Connect the main controller of TEL (such as PLC or control motherboard) with the actual process module to achieve the implementation of control logic

State acquisition and logic drive

Used for collecting switch signals (DI), outputting relay control signals (DO), or processing analog signals (AI/AO)

Support partial signal redundancy or status feedback function

3、 Typical application areas

Process Control (Etch/CVD)

Control the start/stop of components such as gas panels, heaters, cooling fans, vacuum pumps, etc

Collect input signals such as temperature switch, door lock status, sensor alarm, and chamber vacuum status

Automated transportation system

Control the motion commands of robotic arms, conveyor belts, lifting platforms, etc

Receive status feedback signals such as position, limit, and air pressure

Alarm and interlocking system

Output sound and light alarm

Execute emergency shutdown, interlock protection and other action control

4、 Technical characteristics (typical)

Multi channel digital input/output design (such as 16DI+16DO)

The analog channel supports 0-10V and 4-20mA signals (such as compatible flow meters and temperature controllers)

Industrial standard interface, compatible with various types of field devices

Optoelectronic isolation design to prevent external interference or overvoltage from affecting the main control system

Plug in or backplane installation, easy to replace and maintain

Can support functions such as error detection, self diagnosis, and communication status monitoring

Product imag

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