TEL Tokyo Electron 3T81-000003-1 Circuit Board
Product Details Introduction
1、 Basic Information
Product model: 3T81-000003-1
Product Name: Circuit Board
Manufacturer: Tokyo Electron Ltd
Product Category: Control/Interface Printed Circuit Board (PCB)
Applicable equipment: Used in TEL semiconductor manufacturing equipment (such as etching, CVD, cleaning and other equipment series)
2、 Functional positioning
Equipment Control and Signal Processing
Used as a control core board or interface relay board in device subsystems, responsible for receiving, transmitting, and processing digital or analog signals.
Modular system integration components
Plays a bridging role between the main control system and the execution module, carrying control logic or data distribution tasks.
Data Communication and Input/Output Control
May undertake functions such as I/O control, level conversion, sensor/actuator signal management, etc.
3、 Application Fields
Internal control system of semiconductor equipment
Widely used in the process equipment of Tokyo Electron, such as:
Etch etching system
Chemical Vapor Deposition System (CVD)
Dry Cleaner system
Transfer/Handler Control System
Signal interface layer between device subsystems
Installed in the device host or split module, used for integrating and routing critical control signals.
4、 Technical characteristics (typical)
Industrial grade multi-layer PCB design with excellent signal integrity and anti-interference performance
Support high-speed data/control signal transmission and adapt to TEL internal communication protocol
Can be connected to other modules through backplane connection or flat ribbon cable
Equipped with diagnostic and status feedback functions (depending on the version)
Long design lifespan, low maintenance cycle, and support for modular replacement
Product imag

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