TEL Tokyo Electron 3M80-002734-12 Processor Module

TEL Tokyo Electron 3M80-002734-12 Processor Module

Product Details Introduction

Product model: TEL Tokyo Electron 3M80-002734-12

Product type: Processor Module

Functional positioning: The core computing and control unit of semiconductor manufacturing equipment, responsible for executing system operations and coordinating equipment control

1、 Product Function Overview:

3M80-002734-12 is an embedded processor module designed by Tokyo Electron (TEL) and widely used in various semiconductor devices. This module is responsible for executing the control program of the equipment, processing data from sensors and I/O modules, generating control signals to drive the process execution unit, achieving automated control of the equipment and precise process management.

2、 Main application areas:

Semiconductor process equipment main control processing

Applied to CVD, PVD, plasma etching, diffusion furnaces, cleaning equipment, etc., as a central control unit to manage process flow and equipment actions.

Process Management and Calculation

Run embedded control software to process complex process parameters and adjust the process environment in real-time (temperature, pressure, gas flow rate, etc.).

Signal acquisition and feedback control

Process various sensor signals returned by I/O modules, perform data analysis, provide feedback control instructions, and ensure process stability.

Equipment subsystem coordination and communication

Communicate with other modules (such as I/O interface board, communication module, display terminal) to achieve overall coordination and information synchronization of the device.

Equipment status monitoring and maintenance support

Record equipment operating status and fault logs, support remote diagnosis and maintenance, and improve equipment reliability.

3、 Typical applicable equipment:

TEL Unity series plasma etching equipment

TEL Trias thin film deposition system

TEL Alpha series diffusion furnace

TEL Clean Track wafer processing equipment

Product imag

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