TEL Tokyo Electron 2180-020433-12 Digital Input Card

TEL Tokyo Electron 2180-020433-12 Digital Input Card

Product Details Introduction

Product model: TEL Tokyo Electron 2180-020433-12

Product type: Digital Input Card

Functional positioning: Used for collecting digital signals from equipment on-site, realizing the transmission and processing of digital signals

1、 Product Function Overview:

The 2180-020433-12 digital input card is a key input module designed by Tokyo Electron (TEL), specifically designed for collecting digital signals from sensors, switches, relays, and other sources in semiconductor equipment. This card is responsible for converting the on-site on/off status, pulse signals, etc. into digital signals that can be processed by the control system, achieving accurate monitoring and control of the equipment.

2、 Main application areas:

On site equipment status collection

Collect digital information such as valve switch status, limit switch signals, and photoelectric sensor outputs to reflect the real-time operation status of the equipment.

Process equipment control feedback

Support digital signal acquisition of key action points in semiconductor equipment such as etching machines, deposition equipment, and diffusion furnaces, providing accurate feedback data for the main control system.

Equipment interlocking and safety control

By collecting digital signals, equipment interlocking, safety protection, and alarm triggering functions are achieved to ensure the safety of equipment and personnel.

Modular control system interface

As part of the modular control architecture, it enables data exchange with control units such as the main control board and PLC.

Remote monitoring and maintenance support

Support remote reading of digital input status to achieve device operation monitoring and fault diagnosis.

3、 Typical applicable equipment:

TEL Unity series plasma etching equipment

TEL Trias thin film deposition system

TEL Alpha series diffusion furnace equipment

TEL Clean Track wafer processing and cleaning equipment

Product imag

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