TEL Tokyo Electron 2L81-050086-11 Control Pulse Card

TEL Tokyo Electron 2L81-050086-11 Control Pulse Card

Product Details Introduction

Product model: TEL Tokyo Electron 2L81-050086-11

Product type: Control Pulse Card

Functional positioning: a key module used for pulse signal generation and control in semiconductor equipment

1、 Product Function Overview:

2L81-050086-11 Control Pulse Card is an electronic control module specially designed by Tokyo Electron (TEL) for its semiconductor manufacturing equipment. It is mainly responsible for generating and adjusting control pulse signals to drive precision actuators such as motors, valves, lasers, etc. in the equipment, achieving high-precision action control.

2、 Main application areas:

Precision motion control system

Control the pulse input of stepper motors, servo motors, etc. to ensure accurate positioning and movement of devices such as wafer transfer, alignment robotic arms, and rotating platforms.

Synchronization control of process equipment actions

Used in etching machines, CVD, PVD and other equipment to coordinate the action timing of multiple components, and achieve synchronous start, stop and speed adjustment through pulse signals.

Signal conditioning and amplification

Shape, amplify, and isolate external control signals to ensure the stability and anti-interference ability of pulse signals.

Pulse signal output interface

Provide standardized pulse signal interfaces to collaborate with other control modules (such as the main control board and I/O modules) to complete complex action control.

Equipment maintenance and diagnosis

Integrated self diagnostic function, monitoring the quality and output status of pulse signals, supporting fault detection and maintenance management.

3、 Typical applicable equipment:

TEL Unity series plasma etching equipment

TEL Trias thin film deposition system

TEL Alpha series diffusion furnace equipment

TEL Clean Track wafer processing and cleaning equipment

Product imag

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