TEL Tokyo Electron DS1187-029773-13 servo motor module

TEL Tokyo Electron DS1187-029773-13 servo motor module

Product Details Introduction

Product Name: Servo Motor Module

Product model: DS1187-029773-13

Manufacturer: Tokyo Electron Ltd, TEL）

Component classification: Motor control module/servo drive control subsystem

1、 Product Overview:

DS1187-029773-13 is a servo motor control module used in TEL semiconductor manufacturing equipment. The main function of this module is to drive and control precision moving parts, such as wafer transfer arms, lifting platforms, wafer loading robotic arms, rotating mechanisms, etc.

This type of module is used in conjunction with the servo motor body for precise position, velocity, and acceleration control, and is commonly used in critical areas that require extremely high precision in repeated positioning.

2、 Main functions:

Functional category description

Motor control executes control commands such as start stop, steering, acceleration and deceleration of servo motors

The encoder feedback interface receives real-time data such as position and velocity returned by the encoder, achieving closed-loop control

Parameter configuration can set maximum speed, acceleration, PID control parameters, etc

The protection mechanism has functions such as overload protection, temperature protection, and abnormal position alarm

Communication and interface with the upper computer (PLC/main control system) through CAN, RS485, TEL custom bus and other communication methods

3、 Possible technical parameters (based on the general specifications of TEL servo system):

Typical parameter range of the project

Drive mode: fully digital closed-loop servo control

Single axis or dual axis control (depending on the specific version)

Power input DC 24V/AC 100~240V (depending on equipment matching)

Compatible with TEL specific servo motors and brushless motors with encoder feedback

Position control accuracy in micrometers (determined by encoder resolution and transmission structure)

Customized communication protocols such as TEL, EtherCAT, RS-485, CANopen, etc. (depending on the device)

Product imag

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