AMAT 0010-30770 Vacuum Pump Valve

AMAT 0010-30770 Vacuum Pump Valve

 Introduction

AMAT 0010-30770 vacuum pump valve is compatible with CENTURA and ENDURA series semiconductor vacuum equipment. It is installed at the inlet end of the mechanical pump, isolating the chamber from the vacuum pump, preventing oil backflow, and maintaining vacuum sealing.

1. Pneumatic integrated drive, quick valve opening and closing response, no delay in process switching

2. Power off, automatic locking and sealing, shutdown to isolate pump oil backflow and contamination of wafer chamber

3. 316L stainless steel valve body, electrolytic polished low exhaust gas, meets semiconductor cleanliness standards

4. FFKM perfluorinated seal, resistant to etching and deposition of various corrosive process gases

5. Extremely low leakage rate, stable maintenance of high vacuum chamber process environment

6. Built in mechanical limit switch, real-time feedback of on/off position signal to the main control

7. Bidirectional airflow barrier design to prevent pressure fluctuations caused by negative pressure gas reflux

8. Wide temperature tolerance design, suitable for continuous high and low temperature working conditions in vacuum workshops

9. No dead angle channel structure, less likely to accumulate dust particles, reducing the risk of wafer contamination

10. High frequency opening and closing durable structure, stable and leak free after millions of cycles

11. Standard flange interface, easy disassembly, replacement, and maintenance operation

12. Miniature valve body, pump assembly pipeline layout saves internal space of equipment

13. Anti plasma corrosion, resistant to chamber process plasma environment erosion

14. Original factory standard specifications, compatible with AMAT devices of the same series that can be directly replaced

15. Factory vacuum leak detection and full inspection, with uniform batch sealing and low failure rate

In summary, AMAT 0010-30770 vacuum pump valve has reliable sealing, clean and corrosion-resistant properties, and is the core isolation and protection valve of the vacuum pump circuit in semiconductor vacuum systems.

Product imag

ontroller Module

 CHBX01R 2VAA008575R1 redundant module base
ALSTOM 3EST125-975 DCC2382A Control Panel
Elmo G-TUB30480ERSS0 Ethernet servo driver

Other website links

3BHB002916R0001 UFC721AE模拟输入卡
MRP768176电源模块
MRP680489可编程逻辑控制器

SC724A-001-PM72007	CACR-SR15SB1AF-Y100	EXM-2
SC724A001	CACR-TS111Z1SR	61-0367-38
SC723B001	CACR-TM555Z1SP	HSK-0018-60
SC723A-001-PM72032	CACR-SR06TZ0SM	879-8103-002A
SC723A-001-PM72012	CACR-SR05SB1AF	61-0881-20
SC723A-001-PM72004	6SC6100-0GB02	7LA11
SC723A001	6SC6100-0NA21	6ES5-456-7LA11