TEL Tokyo Electron 381-64060-1 restriction board

TEL Tokyo Electron 381-64060-1 restriction board

Product Details Introduction

TEL Tokyo Electron 381-64060-1 restriction board

Product Category: Limiter Board

Manufacturer: Tokyo Electron (TEL)

Model: 381-64060-1

1、 Main functions

Signal protection: Limit voltage, current, or noise to prevent circuit damage.

Signal conditioning: Maintaining communication or control signals within a safe range.

Static electricity suppression: prevents electrostatic discharge (ESD) from affecting the backend electronic module.

Module isolation: It serves as a signal buffer or electrical isolation to reduce interference.

2、 Typical application areas

Circuit protection in semiconductor equipment

Commonly used for signal transition protection between internal modules such as CVD, Etch, PVD, and cleaning systems.

Wafer processing system

Limit surge signals in wafer handling, heating, cooling, or vacuum chamber interfaces.

RF/High Frequency Power Supply System

Used to protect the RF link on the channel from the RF power output to the plasma chamber.

Control interface of vacuum equipment

Prevent equipment misoperation caused by power fluctuations or external interference in control signals.

Lithography/development system interface module

Connect actuators and control boards in lithography machines or development systems to limit the impact of abnormal signals.

3、 Examples of Applicable Devices (TEL)

Trias, Unity Pro series CVD systems

Tactras series etching equipment

ACT12, Lithium and other cleaning and developing equipment

ALD and other front-end equipment such as diffusion furnace systems

Product imag

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