TEL Tokyo Electron 3M08-027471-11 Interface Module

TEL Tokyo Electron 3M08-027471-11 Interface Module

Product Details Introduction

Product Name: TEL Tokyo Electron 3M08-027471-11 Interface Module

Equipment type: Interface control module/I/O module

Manufacturer: Tokyo Electron Ltd

1、 Main application areas

Semiconductor Manufacturing Equipment

Applied to the front-end process equipment of Tokyo Electron, such as:

Etcher equipment

Chemical Vapor Deposition Equipment (CVD)

Atomic layer deposition equipment (ALD)

Modules are used as signal interaction interfaces between control systems, sensors, and actuators.

automatic control system

Control the start and stop status of devices such as air valves, pumps, heaters, and coolers.

Implement equipment interlocking logic management and safety control.

I/O signal processing

Process external input/output digital and analog signals.

Connect PLC and main control board to achieve process status monitoring and response.

Wafer Handling System (EFEM/FOUP Interface)

Manage the automatic transfer process of wafers between devices.

Receive status signals from the wafer transfer system.

Clean room equipment interface

Used for standardized interface connections between equipment in clean rooms to ensure communication and synchronous operation.

2、 Typical Function Overview

Digital/Analog Input/Output Interface

Electrical isolation and protection function

Communication protocol support (such as TEL proprietary interfaces RS232/422/485）

Fault detection and status indication function

PCB architecture that is hot swappable or easy to maintain

Product imag

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