KLA Tencor 710-659274-00 Single Axis Controller

KLA Tencor 710-659274-00 Single Axis Controller

Product Details Introduction

The KLA Tencor 710-659274-00 single axis controller is a high-performance control module designed specifically for precision motion control, widely used in semiconductor manufacturing and testing equipment. The following are the main application areas of its products:

1、 Semiconductor equipment

Wafer Inspection System

Used for driving and controlling the single axis precision movement of wafer stages, achieving high-resolution scanning and positioning.

For example, in Surfscan, e-beam, or optical detection systems, ensure precise line scanning or spot checking positions.

Photolithography machine

Control the linear movement of the mask or wafer platform to achieve sub micron level alignment.

Collaborate with the laser interferometer system to ensure stable trajectory and synchronized feedback.

Metrology Tools

Used to control the single axis sliding of probes, lasers or cameras, achieving precise measurement of parameters such as thickness, step height, CD, etc.

Support closed-loop control and fast response mechanism.

2、 Precision machining and nanoscale motion platform

Used in nanoimprint, precision etching, ion implantation and other equipment to drive moving components and achieve high-speed and low error processing.

Control the single axis slide table for sample handling and process flow switching.

3、 Microscopic imaging and defect analysis

Used for controlling the X/Y/Z uniaxial movement of sample trays in electron microscopy systems (such as SEM or TEM) to obtain multi angle imaging.

Support precise re examination and automatic repositioning of defect areas.

Product imag

Related website links

SANYO P30B0601DXS8SM servo motor

ADLINK CPS-H325/24 power module

ASEA YM316001-NL Double Plate Component

Other website links

ABB UFC760BE01 3BHB007030R0001 可编程控制器

GE IS220PDOAH1A 336A4940CSP2 固态继电器

GE  IS420PUAAH1A  以太网交换机