Azbil SPG0ZT13RZS000RL Capacitive Diaphragm Vacuum Gauge

Azbil SPG0ZT13RZS000RL Capacitive Diaphragm Vacuum Gauge 

Product Introduction

The Azbil SPG0ZT13RZS000RL capacitive diaphragm vacuum gauge relies on a single crystal sapphire pressure sensing film, which is resistant to high temperature and corrosion, and can achieve high-precision pressure monitoring in low vacuum ranges. It is commonly used for pressure closed-loop control in precision vacuum processes.

Product application areas

1. Vacuum monitoring of semiconductor ALD atomic layer deposition process

2. Pressure measurement and control of semiconductor CVD chemical vapor deposition chamber

3. Vacuum environment monitoring of semiconductor PVD sputtering coating

4. Vacuum pressure collection for semiconductor dry etching process

5. Vacuum freeze-drying equipment chamber pressure detection

6. Optical coating and vacuum evaporation film preparation equipment

7. Precision vacuum chamber pressure measurement in research laboratories

8. Pressure control of special material heat treatment vacuum furnace

9. Vacuum injection and baking process for lithium batteries

10. Analytical instruments, mass spectrometry equipment, vacuum pressure monitoring

Product Specifications

1. Measurement range: 13Pa full range, suitable for low vacuum fine measurement scenarios

2. Pressure sensing material: single crystal sapphire diaphragm, strong corrosion resistance, resistant to process deposits

3. Measurement principle: Capacitive detection, with excellent measurement repeatability and linearity

The Azbil SPG0ZT13RZS000RL vacuum gauge, with its stable zero point characteristics and high temperature resistance, can cope with various harsh vacuum processes, ensuring equipment process stability and product yield.

Product imag

ontroller Module

Honeywell 51307198-276输入输出模块
Honeywell SC-UCMX02安全控制器
369B1859G0022 电流互感器 

Other website links

ADEPT 10350-00104 Relay output module
ADEPT ASSY10332-00505 Relay input module
ADEPT AWCII 040 Voltamodule