AMAT 0190-49999 servo motor

AMAT 0190-49999 servo motor 

Product Introduction

AMAT 0190-49999 servo motor

Product Features

1. Low inertia AC servo body, with rapid dynamic response, can meet the high-frequency start stop action of wafer mechanism.

2. Built in high-precision encoder, precise position feedback, and micrometer level repetitive positioning capability.

3. Compact body design, suitable for narrow compartments of semiconductor equipment, with sturdy joints and resistance to electromagnetic interference.

Application Fields

1. Semiconductor wafer transfer robotic arm

2. Etching equipment cavity moving mechanism

3. Feed unit of thin film deposition equipment

4. Wafer stage rotation drive device

5. Semiconductor cavity door valve transmission component

6. Precision positioning module for ion implantation machine

7. Motion axis of wafer inspection platform

8. Execution mechanism of plasma process equipment

9. Transplanting unit for semiconductor pre-processing equipment

10. Precision semiconductor tooling adjustment mechanism

Product Specifications

1. Communicate servo drive types and match them with AMAT's original servo control system.

2. Integrated incremental encoder, real-time output of position and speed signals.

3. Adapt to the temperature and humidity conditions of semiconductor equipment cabinets, with overload protection.

AMAT 0190-49999 servo motor is a specialized moving component for semiconductor process equipment, responsible for various wafer transfers and precision positioning drives, ensuring stable operation of the entire equipment process.

Product imag

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