AMAT 0190-48210 Linear actuator component

AMAT 0190-48210 Linear actuator component 

Product Introduction

AMAT 0190-48210 Linear actuator component

Product Features

1. Integrated precision linear motion assembly with high stroke positioning accuracy, suitable for micro feed actions inside semiconductor cavities.

2. Vacuum compatible structural design, low gas emission material, can operate stably in the vacuum environment of the process chamber.

3. Integrated encoder and limit sensor, complete assembly module, quick and convenient replacement of spare parts for the whole machine.

Application Fields

1. Semiconductor wafer processing chamber

2. Motion mechanism of thin film deposition equipment

3. Etching machine chamber lifting and pushing unit

4. Fine tuning device for wafer stage

5. Semiconductor cavity door valve driving component

6. Precision feed mechanism of ion implantation machine

7. Mobile module for plasma process equipment

8. Wafer inspection equipment positioning slide table

9. Transmission components of chemical vapor deposition equipment

10. Semiconductor process chamber fine-tuning execution unit

Product Specifications

1. Built in position feedback encoder, providing real-time feedback of linear displacement data.

2. Adapt to standard servo drive signals for semiconductor equipment.

3. Low escape material, meeting the environmental requirements for vacuum chamber use.

The AMAT 0190-48210 linear actuator component is a specialized motion assembly for semiconductor process equipment, responsible for precise linear displacement driving inside the cavity to ensure precise and controllable wafer processing actions.

Product imag

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