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  • TEL BB87-004612-11 Controller
  • TEL BB87-004612-11 Controller
  • TEL BB87-004612-11 Controller
TEL BB87-004612-11 Controller TEL BB87-004612-11 Controller TEL BB87-004612-11 Controller

TEL BB87-004612-11 Controller

TEL BB87-004612-11 Controller

Product Introduction

The TEL BB87-004612-11 controller is a dedicated main control component for Tokyo Electronic Semiconductor Equipment, responsible for wafer process operation scheduling signal calculation and coordinated control of equipment components, adapting to the stable operation of TEL's original semiconductor process equipment

Product Features

High speed processing of multi-channel process instructions ensures precise timing of wafer processing actions

Built in multiple hardware security protections, quick shutdown protection triggered by abnormal working conditions

Strong anti-interference board level design, suitable for complex electromagnetic environments in semiconductor workshops

Modular integrated structure, easy disassembly and replacement of spare parts, reducing downtime

Real time collection of device status information, convenient for operation and maintenance to quickly locate fault points

Application Fields

Main control unit of semiconductor etching equipment

Wafer cleaning equipment control system

Signal controller for thin film deposition equipment

Electronic control module of ion implantation equipment

Semiconductor lithography supporting equipment

Wafer debonding process equipment

Semiconductor oxidation diffusion equipment

Precision wafer inspection equipment

Semiconductor wet process equipment

Microelectronics processing automation equipment

Product Specifications

Suitable for dedicated DC power supply for semiconductor equipment cabinets

Can operate continuously for a long time in a dust-free cabinet environment

Compatible with TEL devices' internal dedicated high-speed communication bus

TEL BB87-004612-11 controller, as the core control spare part of semiconductor process equipment, coordinates the overall process flow and signal interaction of the whole machine, and is widely used in various precision process equipment for wafer manufacturing

Product imag


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AMAT 0100-00689TP-7775-18237-1597
AMAT 0100-09063TP-7919-1PPD113B01-10-150000 3BHE0237
AMAT 0100-13025TP-8002-35SHY3545L0009 3HB013085R00C
AMAT 0100-00080TP-8059-0HYDRAN M2
AMAT 0100-71141TP-8076-2K2-200 CP253/W
AMAT 0100-09235TP-8088-1OP362-LD/-5200


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