Oxford plasma PC91S21083 control board

Oxford plasma PC91S21083 control board

Product Introduction

The Oxford plasma PC91PDO83 control board is a dedicated main control board for Oxford plasma etching equipment, which controls plasma process parameters and equipment action signals.

Product Features:

1. Accurate process signal acquisition and stable control of plasma etching process.

2. The board has isolation protection to resist electromagnetic interference from plasma chambers.

3. Original factory customized development, perfectly matching Oxford plasma equipment.

4. Equipped with fault monitoring function, it can promptly report equipment abnormalities.

5. It can operate continuously for a long time and adapt to the harsh working conditions of semiconductor fabs.

Application fields:

6. Semiconductor plasma etching equipment.

7. Thin film deposition process equipment.

8. Silicon based wafer processing system.

9. Compound semiconductor manufacturing equipment.

10. MEMS micro nano processing equipment.

11. Optical device plasma processing equipment.

12. Plasma technology equipment in research laboratories.

13. Electric control unit for power device production equipment.

14. Oxford plasma equipment maintenance and replacement.

15. Micro nano structure preparation process equipment.

Product Parameters:

16. Board type: Plasma process control motherboard.

17. Compatible equipment: Oxford Instruments plasma processing system.

18. Multiple channels for digital and analog signals.

The Oxford plasma PC91PDO83 control board is the core electronic control spare part of Oxford plasma equipment, ensuring stable output of etching and deposition processes

Product imag

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