Seren 9400000003 RF power supply

Seren 9400000003 RF power supply

Product Introduction

The Seren 9400000003 RF power supply is a specialized RF generator for semiconductor plasma processes under the Seren brand. It provides stable RF power output for etching and deposition equipment, and is compatible with wafer manufacturing plasma processing equipment. It is a core power supply spare part for semiconductor processes.

Product Features

1. Stable output power, high power control accuracy, ensuring plasma process consistency

2. Support pulse modulation function, flexible adjustment of duty cycle to adapt to different process requirements

3. Built in load detection and protection mechanism, automatically protects in case of abnormal reflected power

4. Compatible with digital and analog communication interfaces, convenient for accessing the device's main control system

5. Industrial solid-state circuit design, strong adaptability to clean workshops, and reliable long-term continuous operation

Application Fields

1. Plasma excitation power supply for semiconductor wafer etching process

2. RF source supply for thin film deposition PVD and CVD processes

3. Plasma treatment process for flat panel display panels

4. Plasma surface modification treatment of photovoltaic cells

5. Replacement and maintenance of original RF power supply spare parts for semiconductor equipment

6. Power drive unit for plasma cleaning equipment

7. Optical coating plasma assisted deposition process

8. Power supply for plasma experimental equipment in scientific research laboratories

9. Material surface modification and plasma activation treatment

10. Upgrading and Renovation Project for Old Semiconductor Process Equipment

Seren 9400000003 provides reliable RF energy for plasma processes and is a commonly used spare part for semiconductor process equipment

Product imag

ontroller Module

ZYGO 7724 Displacement interferometer
 5SHX2645L0006 3BHB012961R0002 Thyristor module
 CI869K01 3BSE049110R1 processor module

Other website links

 LDGRB-01 3BSE013177R1 控制器模块
 07DC92D GJR5252200R0101 I/O 模块
YASKAWA CACR-SR07BE12M 伺服电机模块