AE 3155094-003 A RF matching module

AE 3155094-003 A RF matching module

AE 3155094-003 A RF matching module

This AE 3155094-003 A RF matching module is used for semiconductor plasma equipment, responsible for RF impedance matching to reduce reflected power

Product Features

Fixed impedance matching design suitable for 13.56MHz RF circuit

Reduce reflection power and stabilize plasma state

Strong tolerance to cavity process fluctuations

Adapt to AMAT equipment installation structure

Metal cavity protection is suitable for use in clean workshops

Application Areas

Semiconductor etching process equipment

Thin film deposition PVD equipment

PECVD plasma equipment

Wafer plasma cleaning equipment

Integrated Circuit Manufacturing Production Line

Storage chip processing equipment

Compound semiconductor process equipment

Replacement of spare parts for semiconductor equipment

Plasma surface treatment equipment

Semiconductor Process Testing Platform

All types of plasma process equipment can use AE 3155094-003 A RF matching module to ensure stable RF output and ensure semiconductor process consistency

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