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  • MKS AS00680G-11 Integrated Pressure Controller
  • MKS AS00680G-11 Integrated Pressure Controller
  • MKS AS00680G-11 Integrated Pressure Controller
MKS AS00680G-11 Integrated Pressure Controller MKS AS00680G-11 Integrated Pressure Controller MKS AS00680G-11 Integrated Pressure Controller

MKS AS00680G-11 Integrated Pressure Controller

MKS AS00680G-11 Integrated Pressure Controller

 Introduction

MKS AS00680G-11 Integrated Pressure Controller

This MKS AS00680G-11 integrated pressure controller integrates sensors, valves, and control circuits together, ensuring stable and user-friendly pressure regulation

Product Features

High precision pressure control and fast response speed

Integrated design, reducing external accessories

Equipped with pressure alarm function to protect the process chamber

Support industrial communication and facilitate access to device systems

Corrosion resistant material, compatible with various process gases

Application Areas

Semiconductor vacuum process equipment

Thin film deposition coating equipment

Precision analytical instrument vacuum chamber

Laboratory research vacuum system

Photovoltaic device manufacturing equipment

Vacuum heat treatment process equipment

Optical component processing equipment

Material research and development vacuum processing equipment

Precision leak detection testing equipment

Plasma process equipment

MKS AS00680G-11 integrated pressure controller can be selected for various vacuum process scenarios to stably control the chamber pressure and ensure the quality of production processes

Product imag

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ontroller Module

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PMA22B-10114-01AMAT  0100-35213PFEA112
PMA22B-10100-00AMAT 0100-14003PFTL101A-0.5 3BSE004160R1 0.5 
PMA22B-01100-22AMAT  0100-35279PFTL101A-1.0KN 3BSE004166R1
PMA22B-01100-00AMAT 0100-77043PFTL 101AER-1.0KN
PMA22B-00100-00AMAT 0100-00060PFTL-101A 3BSE008508R1
PMA21B-10100-00AMAT 0100-00059PFEA112-65


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