PolyScience 6360TB1SP23C circulating chiller

PolyScience 6360TB1SP23C circulating chiller

 Introduction

PolyScience 6360TB1SP23C circulating chiller

Product Features

High temperature control accuracy and stable removal of equipment heat

Real time monitoring of flow pressure, automatic alarm for abnormal situations

Low noise operation is suitable for long-term work in the workshop

Equipped with liquid level protection to prevent damage to equipment due to water shortage

Simple structure, easy maintenance and replacement of filter element

Application Areas

Constant temperature cooling of semiconductor RF power supply

Cooling of plasma etching equipment heat source

PVD coating target cooling and temperature control

Heat dissipation and temperature control of CVD process equipment

Replacement of spare parts for production line chiller

Refurbishment of equipment with matching temperature control unit

Experimental vacuum equipment cooling system

Constant temperature heat dissipation for laser processing equipment

Circulating cooling of ion source equipment

Temperature controlled cooling of optical detection instruments

The model of this circulating chiller used for constant temperature heat dissipation in semiconductor process equipment is PolyScience 6360TB1SP23C.

Product imag

ontroller Module

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RELIANCE S-D4004 Communication module

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