AE 3152012-041 DC power module

AE 3152012-041 DC power module

 Introduction

AE 3152012-041 DC power module

Product Features

Stable DC power output, small voltage fluctuations ensure consistency of thin film process

Built in multiple protections for overvoltage, overcurrent, and overheating to reduce machine shutdown faults

Support machine communication signal interaction and remote adjustment of output parameters

Water cooled cooling structure, controllable temperature rise during long-term full load operation

Standardized rack installation structure, easy on-site disassembly and maintenance

Application Areas

DC power supply for semiconductor sputtering coating process

PVD cavity target driving power supply

DC power output of plasma processing equipment

Replacement and maintenance of spare parts for semiconductor production line power supply

Refurbishment and renovation of chip equipment with supporting power supply unit

Research and development of DC power supply unit for experimental coating machine

Power supply for wafer surface modification process

Vacuum deposition equipment chamber power supply module

High power DC power supply for semiconductor testing equipment

Power control for optical thin film preparation process

The model of this DC power module suitable for semiconductor sputtering process is AE 3152012-041.

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