ETO ARX-X247 Drive

ETO ARX-X247 Drive 

 Introduction

ETO ARX-X247 driver is a piezoelectric drive module specifically designed for semiconductor machines

1. Fast output response, precise control of piezoelectric ceramic action

2. Comes with overcurrent and overvoltage protection to prevent damage to piezoelectric components

3. Low noise output ensures stable precision displacement control

4. Support analog signal input, convenient for upper computer control

5. Board type installation, easy and fast replacement and maintenance

1. Model ARX-X247, ETO piezoelectric driver

2. Adapt to piezoelectric ceramic actuator drive

3. Integrated signal amplification and power output

4. Support remote control signal access

5. Built in fault detection and feedback function

Applicable scenarios

1. Precision displacement adjustment unit for lithography machine

2. Wafer stage piezoelectric fine adjustment control

3. Optical precision scanning positioning system

4. Replacement of spare parts for semiconductor equipment

5. Precision measuring instruments with piezoelectric drive

Overall, ETO ARX-X247 is a precision piezoelectric drive spare part, commonly used for repairing and replacing lithography and measuring equipment

Product imag

ontroller Module

A-B 394877-A02 4002604070 inverter motherboard
SHINBORY DENSHI HD-522 module
SK-G9-GDB1-D292 347594-A01 Main control board

Other website links

04220FL11232A 自动化控制器
5SHX1960L0004 可控硅单元模块
WOODWARD 8406-121 EGCP-2 发电机控制器