AMAT 0010-13263 Robot Driver

AMAT 0010-13263 Robot Driver 

 Introduction

The AMAT 0010-13263 robot driver is a servo drive unit for the crystal round robotic arm of an applied material semiconductor machine platform, with precise positioning.

Product Features:

1. Closed loop servo control, small wafer handling positioning error

2. Built in multiple protections, automatic shutdown protection against overcurrent and overheating

3. Fast signal response and smooth start stop action of the robotic arm

4. Industrial grade components, stable and continuous operation of the production line for a long time

5. Standardized modules, time-saving on-site disassembly and maintenance

Product Parameters:

1. Model: 0010-13263

2. Drive type: servo motor drive

3. Compatible machine: AMAT wafer processing equipment

4. Communication: Internal motion bus of the machine

5. Installation: Cabinet slot installation

Application fields:

1. Drive of semiconductor machine platform wafer transfer manipulator

2. Motion control of wafer loading and unloading station

3. Etching equipment upper and lower wafer robot control

4. Mechanical arm unit of thin film deposition equipment

5. Replacement of AMAT old machine drive spare parts

Maintenance and replacement of wafer transfer machine, high matching of AMAT 0010-13263 robot driver

Product imag

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NI SCXI-1304 Digital I/O module
TK457V050 3BSE004394R1 cable

Other website links

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